Colloquia

Summary

This thesis presents a novel approach to liquid tin pumping system for the light

source of extreme ultraviolet (EUV) lithography machines, emphasizing energy ef-

ciency and practical implementation. The proposed concept leverages conventional

high-pressure pumps (above 1000 bar) to overcome limitations in existing design, with

a focus on dening operational requirements and identifying ineciencies.

A lumped mass heat transfer model was developed and solved using standard ODE

schemes in Matlab software to evaluate the energy consumption of the new concept

and compare it to the current design. The study distinguishes between two operating

scenarios: one ensuring low viscosity at all times, requiring higher oil temperatures

(safe), and another omitting viscosity requirements for greater energy savings (unsafe).

The analysis revealed notable improvements in Tin Pump performance. Apart

from obtaining significant timing savings during pump's cycle (pressurization and

depressurization times) a promising reduction in energy consumption was observed.

A 38% reduction in energy consumption for safe case and 75% for the unsafe case was

obtained.

While both congurations meet functional requirements, the unsafe case oers

higher eciency at the cost of operational safety. To further enhance the system, sev-

eral recommendations were proposed: optimization of heat dissipation in the system,

scaling down the system and accepting an increase in pumping cycles, which could

lead to both thermal and mechanical benets, shortening the pump's cycle to reduce

oil's temperature and identifying alternative uid solutions that could make the unsafe

case viable without compromising safety.

These improvements could lead to even greater energy savings, lower operational

costs, and reduced environmental impact.