Colloquia

Samenvatting

Production machines in the semiconductor industry require continuous improvement to keep pace with demand. Cable slabs, bundling cables running between the motion stages and the frame of these machines, are a source of disturbances to the high-precision positioning of those stages. This work develops a tool for modeling cables in these machines, using the recursive geometrically exact beam formulation (RGEBF). Different situations are simulated using several time-integration schemes. The influence of the integration scheme and the approximation of the element mass matrix and force vector on the transient solution is investigated. Furthermore, it is demonstrated that the RGEBF can be used to measure frequency response functions in a simple setup. Results suggest that at least some cables in the cable slabs can be simulated using the RGEBF to predict transient and harmonic behavior.