Colloquia

Samenvatting

 The Reticle Mask (ReMa) blade is an essential component of the lithography machine for producing integrated circuits. This study focuses on the ReMa x-blade, which can be considered as a cantilever beam. The beam is subjected to high acceleration, inducing parasitic vibrations. The objective of this project is to suppress these parasitic vibrations using shear piezoelectric transducers. The shear piezoelectric elements are embedded within a sandwich-structured beam with sidewalls included to isolate the piezoelectric elements from external conditions. The optimal piezo configuration for this system is determined through numerical analysis of the system’s transverse displacement and electromechanical Coupling Coefficient (EMCC). This research investigates two piezo configurations: a non-collocated piezo configuration and a collocated piezo configuration. Based on the numerically identified optimal piezo configuration, prototype designs are manufactured. Although the prototype design does not have sidewalls, it is designed to replicate the system behavior with sidewalls included. The open-loop identification is performed on the prototype systems, and an optimal positive position feedback (PPF) controller method is implemented to suppress the parasitic vibration. This controller provides significant damping for both non-collocated and collocated systems.